Layer termination from ellipsometric info is thoroughly integrated into Aeres®. A range of multi-wavelength and spectroscopic ellipsometry options are offered Together with the ion beam sputter deposition method.
In-situ optical monitoring and Command is available through Angstrom’s optical checking & Manage package deal.
Focus on rotation and carousel indexing Every single have torque sense, protecting against any course of action challenges because of slips or jams in rotation.
The size, situation, and gear ratio of each Earth are optimized to provide the absolute best attainable movie thickness uniformity.
Our Reticle® ion beam sputter deposition techniques are intended and engineered to produce specific optical movies of the highest purity, density, and security.
Variable angle phases let for extremely highly effective slim movie strategies. Having said that, considered one of its most important challenges is reproducibility. The substrate is often set at an extremely oblique angle in relation on the source, along with the films are quite delicate for the precision of the angle.
Angstrom Engineering® designs and engineers Every single Reticle® System to provide our associates from the optics Neighborhood the opportunity to produce the movies they require with great purity, density, and uniformity, all in a really repeatable and automated fashion.
Typically, a QCM is utilized to calibrate an initial deposition rate prior to completing the layer thickness below time Management with a set beam present-day. Shuttering the crystal will drastically prolong its operating life time Zirconium and niobium supply in the course of very long processes or on techniques having a load lock.
Coupled with sample rotation, the variable angle phase that is definitely used for Reticle® offers for in-created angular movement in the deposition flux.
All normal Reticle® platforms involve an additional gridless finish-Corridor ion supply with hollow cathode neutralizer.
The deposition ion source is directed towards a material goal that has been optimized in each sizing and situation for the demanded deposition geometry.
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Angstrom Engineering’s Reticle® devices provide a convert-crucial Option for anyone looking to notice any optical design right into a significant-overall performance film.
A shuttered QCM Found close to the substrate provides responses around the deposition level and physical thickness on the increasing film.
Each and every axis of movement is managed by means of Aeres® employing precision servo motors, delivering better than 0.1 levels of positional accuracy. Entrance side infrared heating bulbs tilt While using the stage to supply a regular temperature profile for reactive processes.